Wide band gap semiconductor films, including silicon carbide (SiC), gallium nitride (GaN), zinc oxide (ZnO) and their compounds and isomers, posess a band gap larger than 3.2 eV, and the characteristic phonon peak lies between 100 and 1500 cm-1. There are many methods to determine the band width and the characteristic phonon peaks, such as photoluminescence, Raman scattering and optical transmission spectra etc. Here we propose a combination of spectroscopic ellipsometry and Fourier transform infrared reflection spectrum analysis by transfer matrix method, which can determine the dispersion spectra and film thickness simultaneously, ranging from ultra-violet (around 250 nm) to far infrared (about 22000 nm). We construct an optical function model based on harmonic oscillator, and demonstrate that the model is suitable for simulating the resonance absorption of incident light with various wavelengths.
.
Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum. Chinese Journal of Light Scattering. 2016, 28(3): 214-219 https://doi.org/10.13883/j.issn1004-5929.201603004