基于光散射理论的玻璃晶圆表面缺陷检测方法研究
涂政乾1*，董立超3，赵东峰3，冯迪2，王慎泽1
Research on Surface Defect Detection Method of Glass Wafer Based on Light Scattering Theory
Tu Zhengqian1*, Dong Lichao3, Zhao Dongfeng3, Feng Di2, Wang Shenze1
光散射学报
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2020, (3): 245
-250
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DOI: 10.13883/j.issn1004-5929.202003008
