结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征
谢灯; 丘志仁; 万玲玉; TIN Chin-che; 梅霆; 冯哲川
Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum
光散射学报
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2016, (3): 214
-219
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DOI: 10.13883/j.issn1004-5929.201603004