Spectral Characterization of 3C-SiC Film Grown on SOI Substrate

Chinese Journal of Light Scattering ›› 2017, Vol. 29 ›› Issue (2) : 187-190. DOI: 10.13883/j.issn1004-5929.201702015

Spectral Characterization of 3C-SiC Film Grown on SOI Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2017, 29(2): 187-190 https://doi.org/10.13883/j.issn1004-5929.201702015

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