We prepared the flower-like silver nanoparticles by using chemical reduction method and deposited it on silicon wafer, TiO2 film and glass plate (AgNP@Si, AgNP@TiO2, AgNP@G) separately in order to get substrates for surface enhanced Raman spectroscopy. The repeatability, sensitivity and uniformity of these substrates were studied by using R6G solution. The detection limit of AgNP@TiO2 and AgNP@Si was 10-8 mol·L-1, while the AgNP@G was 10-7 mol·L-1. Meanwhile, Repeatability and uniformity of AgNP@Si are better than others. The results show that the AgNP@Si has the best Raman enhancement effect, the simple preparation, good repeatability and uniformity.