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Research on Surface Defect Detection Method of Glass Wafer Based on Light Scattering Theory
Tu Zhengqian1*, Dong Lichao3, Zhao Dongfeng3, Feng Di2, Wang Shenze1
Research on Surface Defect Detection Method of Glass Wafer Based on Light Scattering Theory
light scattering theory / non-imaging defect detection / scattered light spatial distribution / scattered light intensity value / defect structure / defect size {{custom_keyword}} /
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