The highly sensitive substrate material is the key to the application of surface-enhanced Raman spectroscopy (SERS) technique. In this study, TiN thin film was compounded with noble metal silver by electrochemical deposition method to improve its SERS sensitivity by using their synergistic effect. The effects of electrochemical deposition parameters on the SERS properties of composite substrates were systematically investigated by means of XRD, SEM, UV-VIS and Raman. The results showed that when the concentration of deposition solution was 5 mmol/L, the deposition voltage was 5 V and the deposition time was 5 min, the two phases of monomeric Ag and TiN coexisted in the composite substrate, the Ag nanoparticles growth along the dominant crystal plane, and the silver particles on the TiN film grew into rod structure with uniform. Comparing with the substrates prepared under other deposition parameters, the composite film synthesized under the above conditions showed more obvious double peaks of plasma resonance absorption, which indicated that the superposition effect of plasma resonance was generated between the monomeric Ag and TiN phases in the system, the electromagnetic field coupling effect was enhanced, so that the local surface plasmon resonance coupling between them was increased, and more SERS "hot spots" were formed on the surface of the film, which was helpful to promote charge transfer, thus the substrate was endowed with more excellent SERS performance. The results confirmed the feasibility of optimizing the electrochemical deposition parameters to modulate the morphology of the composite film and thus improve the performance of SERS substrates, which provide technical support for the preparation of Ag/TiN and other noble metal-semiconductor composite films as SERS substrate materials by electrochemical deposition technology.