Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum

Chinese Journal of Light Scattering ›› 2016, Vol. 28 ›› Issue (3) : 214-219. DOI: 10.13883/j.issn1004-5929.201603004

Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum

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{{article.zuoZheEn_L}}. {{article.title_en}}. {{journal.qiKanMingCheng_EN}}. 2016, 28(3): 214-219 https://doi.org/10.13883/j.issn1004-5929.201603004

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