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中文
Process Optimization of the Residual Stress by Reverse-Epitaxial Growth 3C-SIC Film
王靖宇，邓春纲，马瑶，李芸，杨治美 *，龚敏
The Journal of Light Scattering . 2017, (
4
): 376 . DOI: 10.13883/j.issn1004-5929.201704016
