Humidity sensitive monitoring device with optical fiber coupling was developed in this paper. This device adopts the MEMS micro displacement sensor aided calibration for humidity sensitive micro-cavity coupling location, and the light intensity sensor is used for humidity output quantization. Comparing with other docking calibration platform, this kind of MEMS displacement sensor based coupling position calibration method needs not any huge instrument device, can obtain precise and convenient calibration results. In the sensor system back-end programmable control procedures can be developed, with the loading of data acquisition card to realize the humidity sensitive unit quantity acquisition and display.